The determination of material parameters of
microcomponents using digital holography
S.Seebacher, W.Osten*, T.Baumbach, W.J .uptner
BIAS, Bremer Institut f . ur Angewandte Strahltechnik, Klagenfurter Str. 2, D-28359 Bremen, Germany
Abstract
Progresses in microsystem technology promise a lot of new applications in industry and
research.However, the increased complexity of the microsystems demand sensitive and robust
measurement techniques.Fullfield and non invasive methods are desirable to get access to
spatially resolved material properties and parameters.
This contribution describes a simple and fast interferometric method for the analysis of
shape and deformation of small objects by optical means.These quantities together with a well
defined loading of the components can be the starting point for the determination of material
parameters like Poisson-ratio, Young’s modulus or the thermal expansion coefficient.
參考答案:利用数码全息成像摄影来确定微观构成的物质参数。S.Seebacher, W.Osten*, T.Baumbach, W.J .uptner
BIAS, Bremer Institut f . ur Angewandte Strahltechnik, Klagenfurter Str. 2, D-28359 不来梅，德国
摘录（节选）
微型系统科技的进步确保了在工业和研究领域的许多新技术的应用。然而，微型系统复杂度的增加需要更灵敏、更耐用的测量技术。全领域非侵入性办法可以很好的展现空间内既定的物质的特性和构成。这项发明是在光学领域的一个简单、快捷的干涉性方法，从而可以对小型物体的外形和形状改变进行分析。这些数据和先前定义好的载入成分一起，成为确定如泊松比、杨氏弹性模量或热膨胀系数等物质参数的起点。
（太专业了，光学方面的词语很多我都不能翻译的非常准确，希望我的翻译能起到抛砖引玉的作用吧，谢谢！）