Holographic interferometry and multiple wavelength contouring as well as multiple source
point contouring are precise enough to fulfill the requests for precision and resolution in
microsystem technology even on complex shaped structures with steps or gaps.
A new adaptive, iterative algorithm is developed and applied to the measured results that
allows the numerical evaluation of the phase data to get absolute shape and deformation
information in Cartesian coordinates.Surfaces with holes, gaps and steps can be registered
without any ambiguities.Digital holography as the underlying holographic recording
mechanism is extremely suitable for small objects and lead to simple and compact setups in
which the objects’ shape as well as their deformation behavior can be recorded.Experiments
using silicon microbeams and an object from fine mechanics are described to show the great
potential of these fast and robust measurement techniques with respect to the determination of
material parameters. r 2001 Elsevier Science Ltd.All rights reserved
參考答案:全息干涉量度学与多波长轮廓线以及复合源点轮廓线的精度及高,足以满足微系统技术精度和解析度的要求,甚至在带有阶梯和缺口,形状复杂的结构上也是如此.一种,全新,适用的,迭代算法经研究,诞生,并应用于测量结果.它可使对相位数据的数字评估在卡笛尔坐标上得到实体的形状和变形信息.多孔,缺口,和有阶梯的表面可以通过这种方法明确地记录下来.数字全息术与潜在的全息记录机制一样,适用与形状小的物体,并应用于简单小巧的设备,在这些设备上的物体的形状和变形情况都可被一一记录下来.通过用硅微光束和精细机械上的物体做的实验表明,这些快速,实用的测量技术潜力巨大,可用来测量物体的参数.r 2001 Elsevier Science Ltd 版权所有
最后的英文是公司名,不可随便译成汉语,英语中一些专有名词都是如此,如windows 98 很少翻译成视窗98一样.
