TAP-106:Rare earth oxide thin films稀土氧化物薄膜:生长、表征与应用
分類: 图书,进口原版书,科学与技术 Science & Techology ,
作者: Marco Fanciulli等著
出 版 社: 湖北辞书出版社
出版时间: 2006-11-1字数:版次: 1页数: 426印刷时间: 2006/11/01开本: 16开印次: 1纸张: 胶版纸I S B N : 9783540357964包装: 精装内容简介
Thin rare earth (RE) oxide films are emerging materials for microelectronic, nanoelectronic, and spintronic applications. The state-of-the-art of thin film deposition techniques as well as the structural, physical, chemical, and electrical properties of thin RE oxide films and of their interface with semiconducting substrates are discussed. The aim is to identify proper methodologies for the development of RE oxides thin films and to evaluate their effectiveness as innovative materials in different applications.
目录
Scientific and technological issues related to rare earth oxides : an introduction
Atomic layer deposition of rare earth oxides
MOCVD growth of rare earth oxides : the case of the praseodymium/oxygen system
Requirements of precursors for MOCVD and ALD of rare earth oxides
Models for ALD and MOCVD growth of rare earth oxides
Growth of oxides with complex stoichiometry by the ALD technique, exemplified by growth of La[subscript 1-x]Ca[subscript x]MnO[subscript
Molecular beam epitaxy of rare-earth oxides
Fabrication and characterization of rare earth scandate thin films prepared by pulsed laser deposition
Film and interface layer composition of rare earth (Lu, Yb) oxides deposited by ALD
Local atomic environment of high-[Kappa] oxides on silicon probed by x-ray absorption spectroscopy
Local structure, composition and electronic properties of rare earth oxide thin films studied using advanced transmission electron microscopy techniques (TEM-EELS)
Strain-relief at internal dielectric interfaces in high-k gate stacks with transition metal and rare earth atom oxide dielectrics
Electrical characterization of rare earth oxides grown by atomic layer deposition
Dielectric properties of rare-earth oxides : general trends from theory
Charge traps in high-k dielectrics : ab initio study of defects in Pr-based materials
Experimental determination of the band offset of rare earth oxides on various semiconductors
Band edge electronic structure of transition metal/rare earth oxide dielectrics
Electronic structure and band offset of lanthanide oxides
Electronic structure of rare earth oxides
Rare earth oxides in microelectronics
Requirements of oxides as gate dielectrics for CMOS devices
Rare earth oxides grown by molecular beam epitaxy for ultimate scaling
The magneto-electric properties of RMnO[subscript 3] compounds
Sesquioxides as host materials for rare-earth-doped bulk lasers and active waveguides
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